JPH0434881Y2 - - Google Patents

Info

Publication number
JPH0434881Y2
JPH0434881Y2 JP1987010155U JP1015587U JPH0434881Y2 JP H0434881 Y2 JPH0434881 Y2 JP H0434881Y2 JP 1987010155 U JP1987010155 U JP 1987010155U JP 1015587 U JP1015587 U JP 1015587U JP H0434881 Y2 JPH0434881 Y2 JP H0434881Y2
Authority
JP
Japan
Prior art keywords
fluorocarbon
tank
cleaning
cleaning tank
cooling jacket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987010155U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63118903U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987010155U priority Critical patent/JPH0434881Y2/ja
Publication of JPS63118903U publication Critical patent/JPS63118903U/ja
Application granted granted Critical
Publication of JPH0434881Y2 publication Critical patent/JPH0434881Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Treating Waste Gases (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP1987010155U 1987-01-27 1987-01-27 Expired JPH0434881Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987010155U JPH0434881Y2 (en]) 1987-01-27 1987-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987010155U JPH0434881Y2 (en]) 1987-01-27 1987-01-27

Publications (2)

Publication Number Publication Date
JPS63118903U JPS63118903U (en]) 1988-08-01
JPH0434881Y2 true JPH0434881Y2 (en]) 1992-08-19

Family

ID=30796191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987010155U Expired JPH0434881Y2 (en]) 1987-01-27 1987-01-27

Country Status (1)

Country Link
JP (1) JPH0434881Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2833893B2 (ja) * 1991-11-20 1998-12-09 山口日本電気株式会社 洗浄装置
JP4661604B2 (ja) * 2006-01-18 2011-03-30 パナソニック株式会社 有機溶剤除去システム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6214901A (ja) * 1985-07-15 1987-01-23 Sony Corp フロン蒸気洗浄装置

Also Published As

Publication number Publication date
JPS63118903U (en]) 1988-08-01

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